Analysis of slot coating flow under tilted die

涂层 模具(集成电路) 流量(数学) 振荡(细胞信号) 材料科学 体积流量 机械 弯月面 光学 复合材料 物理 化学 纳米技术 生物化学 入射(几何)
作者
Semi Lee,Jaewook Nam
出处
期刊:Aiche Journal [Wiley]
卷期号:61 (5): 1745-1758 被引量:20
标识
DOI:10.1002/aic.14752
摘要

Slot coating is a high precision coating method, where the film thickness is controlled by the flow rate fed to the die and the production speed. The range of desirable operating conditions for uniform coating is limited by the shape and locations of upstream and downstream menisci, which are controlled by the pressure gradient within the coating flow. The gradient can be controlled by the shape and orientation of the slot coating die, that is, die configuration. Here, the tilted die, the so‐called angle‐of‐attack configuration is considered. The configuration is similar to underbite and overbite configurations, but it has a sloped die lip due to tilting. Coating flows with such a configuration are examined by computer‐aided analysis using the Galerkin/finite element method. Using steady‐state analysis, the effect of the angle of attack on the upstream meniscus location is discussed. In transient analysis, the amplitude of the thickness variation is predicted under different types of disturbances, namely flow rate and gap oscillations. The analysis shows that die lip configurations affect the thickness uniformity under periodic disturbances. The effect of die tilting can be similar to or different from the underbite/overbite configurations, depending on the type of oscillation. During the analysis, the flow rate apportioning inside the coating flow and decomposing thickness variations into two separating oscillations are useful in understanding the results is found. © 2015 American Institute of Chemical Engineers AIChE J, 61: 1745–1758, 2015
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