5.2.3 Design and Fabrication of a Novel 3D Micropellistor

This paper presents a novel 3D micropellistor based on a 3D microheater.The 3D microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology.Then a detector and a compensator was developed by sol-gel process, introducing Pd as the catalytic metal and porous alumna as the reference material.Test results indicate that the 3D catalytic micropellistor has a output voltage of 12 mV to 10% LEL methane.And it has a very high sensitivity, fast response time and liner output voltages.