材料科学
蚀刻(微加工)
箔法
铜
晶界
电子背散射衍射
Crystal(编程语言)
冶金
各向同性腐蚀
微观结构
复合材料
结晶学
图层(电子)
计算机科学
化学
程序设计语言
作者
Weichao Zhao,Rui Feng,Sheng Wang,Yongxiao Wang,Yaokun Pan,Benkui Gong,Xinjun Han,Tianjie Feng
标识
DOI:10.1016/j.mtcomm.2022.105029
摘要
The etching of rolled copper foil is a key process in the production of high-end Flexible Printed Circuit (FPC) boards, which is obviously affected by the microstructure. In this paper, Electron Back Scatter Diffraction (EBSD) was used to characterize the grain boundaries and crystal orientation of 12 µm thick rolled copper foil during etching. The research results show that High Angle Grain Boundaries (HAGBs) are preferentially etched in the initial stage of etching. Compared with the un-etched copper foil, the HAGBs proportion of copper foil etched for 6 min significantly decreases from 54.66 % to 39.92 %. With the increasing of etching time, the crystal orientation gradually becomes the main factor affecting the etching behavior. Compared with the copper foil etched for 6 min, the {001} crystal plane proportion of copper foil etched for 15 min increased from 26.04 % to 56.70 %, and {001} crystal plane has the higher etching resistance in acidic etching solution.
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