Polyimide-based Integrated Transformers and Capacitors for High Voltage Galvanic Isolation

A technology for polyimide-based micro-transformers and capacitors fabrication and the relates simulation modelling platform are presented in this paper. A thick polyimide layer sandwiched between two gold electrodes provides the core of this new architecture, whose target is to withstand a peak voltage of at least 12 kVp. Following simulation outcome, manufacturing optimizations have been adopted, from isolation polyimide process to metals electrochemical growth and definition. Process integration achievements have been characterized by breakdown voltage and TDDB measurements.