灵敏度(控制系统)
石英
谐振器
氢传感器
材料科学
光电子学
氢
化学
电子工程
钯
工程类
催化作用
生物化学
复合材料
有机化学
作者
Akira Nagakubo,Tokiya Matsukura,Hirotsugu Ogi
标识
DOI:10.35848/1347-4065/ad61a7
摘要
Abstract Hydrogen (H 2 ) is an important source of next-generation energy production. The various H 2 sensors developed to date cannot easily detect very low concentrations of H 2 (<10 ppm) at room temperature within 100 s. In this study, we develop H 2 sensors by depositing a 200-nm thick palladium (Pd) film on AT-cut quartz resonators and adding a sub-nm gold (Au) layer on the Pd surface. Moderate Au deposition on the Pd surface improves the sensitivity of the sensor by decreasing the activation energy of atomic-hydrogen migration from the surface to the subsurface. The optimal Au thickness that minimizes the activation energy is 0.5 nm. Finally, we show that the approximate detection limit at room temperature is 5 ppm.
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