卷积神经网络
人工智能
计算机科学
规范化(社会学)
GSM演进的增强数据速率
模式识别(心理学)
直线(几何图形)
辍学(神经网络)
人工神经网络
表面光洁度
高斯分布
计算机视觉
数学
材料科学
物理
机器学习
几何学
复合材料
社会学
量子力学
人类学
作者
Narendra Chaudhary,Serap A. Savari,Sai Swaroop Yeddulapalli
摘要
We propose a deep convolutional neural network named EDGENet to estimate rough line edge positions in low-dose scanning electron microscope (SEM) images corrupted by Poisson noise, Gaussian blur, edge effects and other instrument errors and apply our approach to the estimation of line edge roughness (LER) and line width roughness (LWR). Our method uses a supervised learning dataset of 100800 input-output pairs of simulated noisy SEM rough line images with true edge positions. The edges were constructed by the Thorsos method and have an underlying Palasantzas spectral model. The simulated SEM images were created using the ARTIMAGEN library developed at the National Institute of Standards and Technology. The convolutional neural network EDGENet consists of 17 convolutional, 16 batch-normalization layers and 16 dropout layers and offers excellent LER and LWR estimation as well as roughness spectrum estimation.
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