Adapting Texas Instruments DLP technology to demonstrate a phase spatial light modulator

A prototype of a Phase Spatial Light Modulator (PLM) device has been developed and demonstrated using DLP Micro-ElectroMechanical System (MEMS) based technology. Designed for a visible (405nm to 632nm) laser, this device uses an array of individually-addressable, digitally-controlled PLM micromirrors that can be addressed to multiple discrete vertical positions. The MEMS superstructure process flow used for DMD micromirrors was adapted to enable manufacturing this device on top of an existing DLP technology CMOS device. The prototype has demonstrated good uniformity across the array and the ability to steer light using phase light modulation. A discussion of some initial performance metrics as well as potential applications will be presented.