铌酸锂微纳波导中的二阶非线性光学效应研究进展

Lithium niobate (LiNbO₃, LN) crystal has a large second-order nonlinear coefficient (d₃₃=25.2 pm/V@1064 nm), wide transparent window (0.35–5 μm), and stable periodic microdomain structure preparation, which is a good platform for the study and application of second-order nonlinear optical effects. Lithium niobate thin film (LNTF) is regarded as a promising integrated photonics platform due to its excellent linear and nonlinear optical properties. As the basic unit of an integrated optical system, lithium niobate micro/nano waveguide has been studied as a transmission and control device, and it shows excellent second-order nonlinear optical characteristics. The second-order nonlinearity plays an important role in modern optics, including second-harmonic generation (SHG), sum- and difference-frequency generation, parametric down conversion, and parametric oscillation. Efficient and compact wavelength converters based on second-order nonlinearity are key components for a wide range of applications, including entangled photon sources, optical parametric oscillators, and optical parametric amplifiers. The second-order nonlinear polarization intensity is proportional to the square of the electric field intensity. Micro/nano optical waveguides can improve the light intensity in the device through the local characteristics of the spatial light field, to improve the conversion efficiency of the nonlinear processes. And significantly enhanced electric field strength makes the normalized nonlinear conversion efficiency of LNTF waveguides exceed that of the reverse proton exchange lithium niobate waveguides (frequency conversion efficiency 150% W^–1 cm^–2@1550 nm) by one order of magnitude. The nonlinear conversion efficiency of LNTF micro/nano waveguides can be further improved through mode phase matching (MPM) or quasi-phase matching (QPM) to optimize the spatial overlap between the eigenmodes involved in the nonlinear process. The detailed theory, fabrication and application were demonstrated in the manuscript as follows: (1) The theory of second harmonic generation. As an example of second-order nonlinear process, the factors affecting the conversion efficiency of second harmonic generation were analyzed, and can be summarized as nonlinear coefficient, mode special overlap, mode area and phase-matching condition. (2) The fabrication of periodically poled lithium niobate waveguides and periodically poled technics. Based on the micro fabrication processes such as electron beam lithography, dry etching and chemico-mechanical polishing, the propagation loss could be reduced to 0.027 dB/cm. With the combination of low loss waveguides and the electrode polarization process, periodically poled lithium niobate microstructures and the detailed fabrication processes were discussed in the manuscript. (3) Efficient second harmonic generation based on MPM and QPM. It was reported that the normalized efficiency can reach 1000% W^–1 cm^–2, and we described broadband and tunable SHG in detail. (4) Spontaneous parametric down conversion. With the development of quantum information technology and its application in the fields of secure communication and precision measurement, quantum photon sources with high speed, high brightness and high purity have attracted more and more attention. Due to the strong optical confinement, the micro/nano waveguides reduce the pump power and improve the quality of generated photon pairs, which is helpful to realize the integrated optical path of quantum information processing. In summary, this paper reviews the recent development of second-order nonlinear optical effects in LNTF micro/nano waveguides. Firstly, the theory of second harmonic conversion is introduced, and then the fabrication and periodically poled techniques of LNTF micro/nano waveguides are discussed. As an example, the efficient SHG and parametric down conversion of LNTF waveguides were detailedly demonstrated. The processes of mode phase matching and quasi-phase matching technics, tunable SHG and wideband frequency doubling effect were emphatically investigated.