Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement

In order to perform an exact surface profile measurement with a white-light scanning interferometer (WLSI), an actual optical path difference (OPD) changing with time is detected with an additional interferometer in which the light source of the WLSI and an optical band-pass filter are used. This interferometer is simply equipped in the WLSI and does not negatively influence the WLSI. The real OPD is easily calculated from an interference signal with the same signal processing as that in the WLSI. The interference signal of the WLSI is corrected with the real OPD values or the real scanning position values. The corrected interference signal with a constant sampling interval is obtained with an interpolation method. With this correction method, a surface profile with a step shape of 3-μm height is measured accurately with an error less than 2 nm.