Fabrication of polymer-derived SiBCN ceramic temperature sensor with excellent sensing performance

Sensors that can provide stability and durability in high-temperature and harsh environments are of great significance for real-time temperature monitoring. Herein, different pyrolysis temperatures of Polymer-derived silicoboron carbonitride (SiBCN) ceramics were fabricated and characterized via SEM, XRD, Raman spectroscopy and TEM. A SiBCN ceramic temperature sensor with excellent sensitivity, accuracy, repeatability, stability and response rate was developed based on the semiconductor characteristics of SiBCN ceramics. The sensor was encapsulated in a stainless-steel casing and its performance was evaluated in the range of room temperature (RT) to 980 °C utilizing a high-temperature resistance detection system. The SiBCN ceramics are typical NTC thermistors with B-values up to 3118 K and provide a sensitivity coefficient of − 3.5 %/K to − 0.2 %/K over the range of RT to 980 °C. A series of examinations verify the outstanding accuracy, repeatability and stability of the SiBCN ceramic sensor. Compared to conventional thermocouples, the SiBCN sensor has faster temperature response rate. In combination with the outstanding high-temperature thermomechanical properties of SiBCN ceramics, it is demonstrated that the designed SiBCN ceramic temperature sensor is suitable for temperature measurement in high-temperature and harsh environments.