偏振器
材料科学
光学
消光比
栅栏
电子束光刻
极化(电化学)
透射率
时域有限差分法
表面等离子体子
衍射光栅
严格耦合波分析
旋光法
光电子学
波长
等离子体子
平版印刷术
散射
物理
抵抗
图层(电子)
纳米技术
化学
物理化学
双折射
作者
Shuoqiu Tian,Tao Liu,Xiaohang Pan,Chengyang Mu,Wentao Yuan,Yifang Chen
出处
期刊:Optics Express
[The Optical Society]
日期:2022-12-16
卷期号:30 (26): 47983-47983
被引量:2
摘要
Applications of subwavelength grating based-polarizers for polarimetric detections are being hindered due to the limited extinction ratio. In this work, the structural effect, including the line edge roughness (LER), of the gratings on the polarizing characteristics was studied by both numerical simulations using finite difference and time domain (FDTD) method and experiments, aiming to figure out the optimal grating profile for achieving high transmittance as well as high extinction ratio. Two different configurations of the gratings, one is dual layer Au lines and the other is parabolic shaped Al lines on structured spin-on-carbon (SOC) films were systematically studied and compared. Nanofabrication of the gratings by electron beam lithography without lift-off process were conducted and optical measurements of their polarization properties demonstrate superior performance of the developed polarizers. The origin of the structural effect was explained by the local surface plasmonic modes, existing in the nano-slits in metallic gratings, which is instructive for further enhancement of the polarization performance.
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