Benchmarking and validation of a hybrid model for electropositive and electronegative capacitively coupled plasmas

Abstract In this work, a fluid/Monte Carlo collision (fluid/MCC) hybrid model is developed based on the framework of multi-physics analysis of plasma sources. This hybrid model could be highly accurate in predicting the nonequilibrium phenomena in capacitively coupled plasmas and meanwhile avoid the limitation caused by the computational cost. Benchmarking against the well-established particle-in-cell/MCC (PIC/MCC) method and comparison with experimental data have been presented both in electropositive N 2 discharges and electronegative O 2 discharges. The results indicate that in N 2 discharges, the ion density evolves from a uniform distribution to an edge-high profile as power increases. Besides, the electron energy distribution function (EEDF) at the bulk center exhibits a ‘hole’ at about 3 eV, and the ‘hole’ becomes less obvious at the radial edge, because more low energy electrons are generated there. In O 2 discharges, the EEDF exhibits a Druyvesteyn-like distribution in the bulk region, and it evolves to a Maxwellian distribution in the sheath, indicating the dominant influence of the electric field heating there. The results obtained by the hybrid model agree well with those calculated by the PIC/MCC method, as well as those measured by double probe, except for a slight discrepancy in absolute values. The qualitative agreement achieved in this work validates the potential of this hybrid model as an effective tool in the deep understanding of plasma properties, as well as in the improvement of plasma processing.