材料科学
薄膜
折射率
铋
热电性
溅射
制作
光刻
轮廓仪
光电子学
钨酸盐
光学
电介质
复合材料
表面光洁度
铁电性
纳米技术
冶金
物理
病理
替代医学
医学
作者
David A. Payne,Jahar L. Mukherjee
摘要
Thin films of Bi2WO6 were prepared by rf sputtering from a stoichiometric power target onto glass substrates. As deposited the films were noncrystalline, but after a low-temperature heat treatment (200 °C) the films became highly crystalline and were single phase. Data are given for the fabrication procedure and material characteristics. Profilometry measurements indicate that the films were smooth (±200 Å) and suitable for photolithography. Bismuth tungstate is a highly acentric polar material which may be used in piezoelectric and pyroelectric devices. The recrystallized films were optically transparent and interferometry measurements are reported for the determination of refractive index.
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