Design and Fabrication of 1400V 4H-SiC Accumulation Mode MOSFETs (ACCUFETs)

This paper presents design, fabrication, and electrical performance of 8A, 1400V 4H-SiC ACCUFETs. It is intended to provide detail discussions on channel design, edge termination technique, and electrical characteristics of high current, 1.2kV rated 4H-SiC ACCUFETs.