20kW Solid-state Microwave Source Control System at 915MHz for Microwave Plasma Reactor

This paper presents the control system for 915MHz solid-state microwave source which is used to generate microwave discharge plasmas as needed. The system architecture of microwave source, and control system software design are described in detail. This solid-state microwave source control system includes a touch screen upper computer, a CompactRIO Lower computer and control program. LabVIEW software-based program implement fulfills the function of microwave power control, power and phase data collection, transform, display, and interlock control. After the terminal is connected to the water load, the 915 MHz solid-state microwave source with the control system has achieved a power output of 20 kW. The solid-state microwave source can be used to replace vacuum tube such as magnetron in scientific research field and industrial applications.