The Determination of Deposition Parameters for Carbon-Based Materials in an Inductively Coupled Plasma System Using COMSOL

A 2-D axisymmetric fluid model simulation of inductively coupled discharges of a methane plasma is presented. The continuity equations for charged species and electron energy are solved with COMSOL Multiphysics. A constant frequency and gas pressure, 13.56 MHz and 0.02 Torr, respectively, are used. Initially, a coil power of 100 W is used, but this is later adjusted to include various coil powers up to 600 W. A Boltzmann equation solver is used to calculate the electron energy distribution function (EEDF) and reduced electron mobility. The effects of increased coil power are investigated, and the results indicate that increases in power increases moderately the electron temperature and charge densities. The growth rate of carbon across the substrate holder is mapped to determine a growth profile for the system.