薄脆饼
材料科学
砂纸
蚀刻(微加工)
硅
制作
棱锥(几何)
太阳能电池
光电子学
晶体硅
光学
空白
纳米技术
复合材料
病理
物理
替代医学
医学
图层(电子)
标识
DOI:10.1016/j.mattod.2022.10.014
摘要
In solar cell technology, surface texturing is essential for reducing the reflectance of cell surfaces and increasing their efficiency. This study employs photo-assisted electrochemical etching (PAECE) to fabricate a hybrid structure comprising a reversed pyramid structure and a high aspect ratio macro-pore on the silicon wafer surface, to reduce cell surface reflectance. The experimental results show that the etching depth of the fabricated macro-pore array structure was approximately 67.1 μm and its diameter was approximately 5 μm on the 525-μm-thick sample, such that the aspect ratio of the pore was approximately 13.4:1. The mean reflectance of a blank silicon wafer is 37.4% in the wavelength range of 280–800 nm; however, the reversed pyramid created using a 120-min PAECE process and 25-min RIE can reduce the mean reflectance to 0.7% on the 380-μm-thick sample. The novel fabrication process developed in this study is low cost and the hybrid structure can be applied to antireflection structures in single crystalline silicon solar cells.
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