钻石
材料科学
退火(玻璃)
金刚石材料性能
无定形固体
制作
光电子学
金刚石立方
化学气相沉积
氮化镓
无定形碳
纳米技术
图层(电子)
复合材料
结晶学
化学
病理
医学
替代医学
作者
Jianbo Liang,Ayaka Kobayashi,Yasuo Shimizu,Yutaka Ohno,Seong‐Woo Kim,Koji Koyama,Makoto Kasu,Yasuyoshi Nagai,Naoteru Shigekawa
标识
DOI:10.1002/adma.202104564
摘要
The direct integration of gallium nitride (GaN) and diamond holds much promise for high-power devices. However, it is a big challenge to grow GaN on diamond due to the large lattice and thermal-expansion coefficient mismatch between GaN and diamond. In this work, the fabrication of a GaN/diamond heterointerface is successfully achieved by a surface activated bonding (SAB) method at room temperature. A small compressive stress exists in the GaN/diamond heterointerface, which is significantly smaller than that of the GaN-on-diamond structure with a transition layer formed by crystal growth. A 5.3 nm-thick intermediate layer composed of amorphous carbon and diamond is formed at the as-bonded heterointerface. Ga and N atoms are distributed in the intermediate layer by diffusion during the bonding process. Both the thickness and the sp2 -bonded carbon ratio of the intermediate layer decrease as the annealing temperature increases, which indicates that the amorphous carbon is directly converted into diamond after annealing. The diamond of the intermediate layer acts as a seed crystal. After annealing at 1000 °C, the thickness of the intermediate layer is decreased to approximately 1.5 nm, where lattice fringes of the diamond (220) plane are observed.
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