纳米棒
成核
材料科学
光刻
化学气相沉积
铁电性
纳米技术
基质(水族馆)
化学工程
沉积(地质)
光电子学
化学
生物
海洋学
地质学
工程类
电介质
古生物学
有机化学
沉积物
作者
Hironori Fujisawa,Yasunori Imi,Seiji Nakashima,Masaru Shimizu,Yasutoshi Kotaka,Koichiro Honda
摘要
We describe the selective growth of ZnO nanorods by metalorganic chemical vapor deposition using Pt layers patterned on SiO2/Si by photolithography as nucleation sites, as well as their application to ferroelectric nanorods. The growth of ZnO nanorods on the SiO2 and Pt surfaces was quite different in the nucleation stage. Under specific growth conditions, no nucleation was observed on the SiO2 surface due to its stable and less reactive nature while nucleation easily occurred on Pt due to its catalytic properties. Using this difference, we achieved selective growth of c-axis oriented ZnO nanorods only on Pt dots with lateral dimensions of 40 μm × 40 μm and diameter of 300 nm on the SiO2/Si substrate. The average diameter and length of selectively grown ZnO nanorods were 70–80 nm and ∼10 μm, respectively. By depositing 100-nm-thick Pb(Zr,Ti)O3 layers on the selectively grown ZnO nanorods, Pb(Zr,Ti)O3-covered ZnO nanorods were successfully grown selectively on the patterned Pt layers. These results demonstrate the feasibility of position control of nanorod growth by self-assembly in combination with photolithography for future ferroelectric device applications.
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