Characterisation of the properties of surface-treated indium-tin oxide thin films

We studied the surface properties of indium-tin oxide (ITO) modified by wet (aquaregia, ultrasonication, RCA) and dry (oxygen and argon plasmas) treatments. The influence of surface treatment on ITO was investigated by surface energy, surface roughness, sheet resistance, and workfunction measurements. We report that oxygen plasma treatment induces: (1) the highest surface energy with the highest polarity, (2) the smoothest surface, (3) the lowest sheet resistance, and (4) the highest workfunction. We also observe that the PL efficiencies of PPV, PDPV and PEDOT/PPV on ITO are affected by the surface treatment of ITO.