Evaluation of an optical coordinate measuring machine for measuring grated structures

The use of optical coordinate measuring machines (CMMs) in industrial metrology shows great potential due to a high measurement speed and non-contact working principle. However, at present measurements performed by different users present too large variations. The uncertainty contributions are difficult to quantify and standard uncertainty evaluation procedures are needed. In order to address this issue, we have investigated the uncertainty sources of commercial optical CMMs. We present a comparison on chessboard standards between three different vision systems. The influence of critical measurement parameters on image formation and analysis is discussed.