Influence of Plasma Condition on ICP-MS Tuning Result

[Objective]The research aimed to improve the sensitivity and reduce the spectral interference of oxide and double charge,etc.[Method] The influence of plasma condition,including RF power,sample depth,carrier gas and nebulizer pump,on ICP-MS normal gas model tuning about the sensitivity and oxide ions and doubly charged ions were researched.[Result] Taking ICP-MS 7700x for example,optimum range of plasma condition was given,such as RF power 1 400-1 500 W,sample depth 7.0-8.5 mm,carrier gas 1.05-1.15 ml/min,and nebulizer pump 0.10-0.15 r/s.[Conclusion] The plasma parameter of ICP-MS 7700x was gained.