Magnetron sputtering for development of nanostructured materials

材料科学 溅射沉积 高功率脉冲磁控溅射 溅射 腔磁控管 纳米技术 工程物理 薄膜 工程类
作者
Ajit Behera,Shampa Aich,T. Theivasanthi
出处
期刊:Elsevier eBooks [Elsevier BV]
卷期号:: 177-199 被引量:10
标识
DOI:10.1016/b978-0-12-820558-7.00002-9
摘要

Nanostructured materials (NMs) represent an active area of research have provided significant breakthroughs in several practical applications in many application domains in nanoelectronics, photonics, and textile engineering according to intrinsically various unique properties. The technological importance of nanomaterials is due to their tunable physicochemical characteristics, such as optical absorption, electrical conductivity, and photothermal characteristics. This chapter has discussed about the basics of magnetron sputtering process. Here one can detect the current practices and market demand of magnetron sputtering. All the advantages and limitations associated with the sputtering process and the sputtered products have been discussed. Various magnetron sputtering techniques such as direct current (DC) magnetron sputtering processes, radio frequency (RF) magnetron sputtering, DC-RF magnetron sputtering, ion-beam magnetron sputtering, reactive sputtering, inductively coupled plasma-magnetron sputtering, microwave amplified magnetron sputtering, and high power impulse magnetron sputtering have been demonstrated. Formations of smart material thin film and nanocomposites have been discussed. A brief knowledge on various applications is given here.

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