材料科学
异质结
选择性
纳米颗粒
微电子机械系统
溅射
纳米技术
热液循环
溅射沉积
化学工程
纳米线
催化作用
光电子学
薄膜
化学
生物化学
工程类
作者
Xueyan Wu,Li‐Yuan Zhu,Jie Sun,Kaiyue Zhu,Xiao‐Yong Miao,Meng-Yang Liu,Xuefeng Zhao,Hong‐Liang Lu
出处
期刊:ACS applied nano materials
[American Chemical Society]
日期:2022-04-20
卷期号:5 (5): 6627-6636
被引量:16
标识
DOI:10.1021/acsanm.2c00671
摘要
Pt nanoparticle (NP)-modified SnO2–ZnO (SnO2–ZnO–Pt) core–shell nanosheets (NSs) for hydrogen sulfide (H2S) gas sensing were successfully synthesized via atomic layer deposition, hydrothermal method, and magnetron sputtering. More importantly, the SnO2–ZnO–Pt NS sensing materials were synthesized in situ on microelectromechanical system (MEMS) devices, which are expected to be high-performance gas sensors with superior sensitivity, great selectivity, good reproducibility, and low power consumption. To be specific, the SnO2–ZnO–Pt NSs displayed a high sensitivity (Ra/Rg) of 30.43 and an excellent selectivity when detecting 5 ppm H2S at an operating temperature of 375 °C. Their rate of resistance change was 29.43, which was about 24 and 9 times those of the pristine SnO2 NS (∼1.25) and SnO2–ZnO core–shell NS (∼3.43) sensors, respectively. These substantially improved sensing properties could be mainly attributed to the formation of heterojunctions, catalytic sensitization effect, and increased specific surface area of Pt NP modification. Thus, the proposed SnO2–ZnO–Pt NS gas sensors demonstrate great potential as a high-performance sensing material for application in H2S gas sensors.
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