Modeling, Simulation and Testing of Non-Linear Resonance Behavior in MEMS Torsional Mirrors With Mechanical-Electrostatic Coupling

Abstract In order to obtain high angular displacement, MEMS micromirrors can be driven at resonance. This paper presents experimental and modeling results on the displacement as a function of drive amplitude for standard nickel and nanocrystalline nickel springs in two geometries. Although the resonance frequency of the torsional MEMS oscillators is adequately predicted by a linear mechanical model of the system, prediction of the angular motion at the design displacements requires attention to non-linear effects. Thus a model is proposed which incorporates non-linear effects due to the displacement of the mirror-spring system from its equilibrium position.