Modelling and simulation of structure surface generation using computer controlled ultra-precision polishing

Abstract The applications of structured surfaces have been more widespread. However, research on the fabrication of these surfaces is still far from complete. The paper presents a theoretical and experimental investigation of the generation of structured surfaces by using Computer Controlled Ultra-precision Polishing (CCUP). A surface topography simulation model and hence a model-based simulation system for the modelling and simulation of the generation of structure surfaces by using CCUP have been established and verified through a series of simulation and practical polishing experiments. The results of experiments demonstrate the capability of the model-based simulation system in predicting the form error and the pattern of the 3D-texture generated by using CCUP.