Light‐Driven Conversion of Silicon Nitride Nanopore to Nanonet for Single‐Protein Trapping Analysis

Abstract The single‐molecule technique for investigation of an unlabeled protein in solution is very attractive but with great challenges. Nanopore sensing as a label‐free tool can be used for collecting the structural information of individual proteins, but currently offers only limited capabilities due to the fast translocation of the target. Here, a reliable and facile method is developed to convert the silicon nitride nanopore to a stable nanonet platform for single‐entity sensing by electrophoretic or electroosmotic trapping. A nanonet is fabricated based on a material reorganization process caused by electron‐beam and light‐irradiation treatment. Using protein molecules as a model, it is revealed that the solid‐state nanonet can produce collision and trapping flipping signals of the protein, which provides more structural information than traditional nanopore sensing. More importantly, thanks to the excellent stability of the solid‐state silicon nitride nanonet, it is demonstrated that the ultraviolet‐light‐irradiation‐induced structural‐change process of an individual protein can be captured. The developed nanonet supplies a robust platform for single‐entity studies but is not limited to proteins.