An overview of molecular layer deposition for organic and organic–inorganic hybrid materials: mechanisms, growth characteristics, and promising applications
期刊:Journal of materials chemistry. A, Materials for energy and sustainability [The Royal Society of Chemistry] 日期:2017-01-01卷期号:5 (35): 18326-18378被引量:227
标识
DOI:10.1039/c7ta04449f
摘要
This review makes a comprehensive summary on the processes of molecular layer deposition (MLD) for organic and organic–inorganic hybrid materials, and on their applications.