Monte Carlo simulation of electron-gas-solid interactions in silicate phases under VP-SEM

Finding the optimal conditions to image and characterize heterogeneous and insulating materials under Scanning Electron Microscopy is a major obstacle slowing the improvement of material properties. In this work, an approach is used to obtain the optimal conditions for resolution for Alite Ca3SiO5 and Belite Ca2SiO4 under air environment in Variable Pressure Scanning Electron VP-SEM conditions. This contribution is based on tracking the changes of the volume of interaction of the electrons. The results clearly show the influence of the skirt Rs on the volume of interaction Re(LV) for the different phases. In addition, there are two resolution regimes separated by a so-called better resolution area. The optimal conditions for the identification and characterization of the microstructure of the phases studied are obtained by working in this better resolution region preferably for the pressure lower than 2 torr for specific energy conditions for each phase.