微电子机械系统
有限元法
电子工程
小型化
田口方法
无线
执行机构
无线电频率
工程类
计算机科学
电气工程
电信
物理
结构工程
量子力学
机器学习
作者
J. Joslin Percy,S. Kanthamani
标识
DOI:10.1016/j.mejo.2023.105891
摘要
Micro Electro Mechanical System (MEMS) technology revolutionized electronics by enabling miniaturization and integration of components like sensors, actuators, & switches. MEMS switches offer advantages over conventional switches, with Radio Frequency (RF) MEMS switches gaining attention in wireless communication systems. Designing and optimizing RF MEMS switches necessitate a profound comprehension of their electromagnetic and mechanical behavior, achieved using simulation and optimization techniques. This review provides an overview of different optimization techniques, including Finite Difference Time Domain (FDTD), Finite Element Method (FEM), Method of moments (MoM), Taguchi method, Response Surface Method (RSM), Artificial Neural Network (ANN) model and Evolutionary Algorithm (EA) based model, with the ANN and EA model being the most efficient due to its capability to handle complex designs and provide accurate predictions. This review aims to provide insights into the current state-of-the-art in RF MEMS switch design and optimization, stimulating further research to address existing challenges and limitations.
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