Kinetic Modeling in Temperature-Modulated Semiconductor Gas Sensor Utilizing Eley–Rideal Mechanism and Its Application in Discriminative Detection of VOCs

This study presents a comprehensive kinetic investigation for describing the dynamic sensing process of semiconductor metal oxide (SMO)-based gas sensors, with a focus on the Eley-Rideal mechanism as a valid pathway. The modeling elucidates the direct interactions between volatile organic compounds (VOCs) and adsorbed oxygen on the material surface, providing insights into the temperature-dependent response characteristics of the sensor and addressing selectivity toward different VOCs fundamentally. By incorporating the effects of thermal modulation, the kinetic model was validated through theoretical fitting of experimental data obtained from a fabricated SnO