材料科学
蒸发
氧气
等离子体
吸收(声学)
光学
电子束物理气相沉积
激光器
分析化学(期刊)
阴极射线
梁(结构)
电子密度
电子
薄膜
复合材料
化学
纳米技术
量子力学
物理
有机化学
色谱法
热力学
作者
Jianhua Zhang,Jianda Shao,Dawei Zhang,Shuhai Fan,Tu Tan,Zhengxiu Fan
出处
期刊:Optics Letters
[The Optical Society]
日期:2004-12-15
卷期号:29 (24): 2870-2870
被引量:39
摘要
ZrO2 films are deposited by the electron-beam evaporation method. Parts of the prepared samples are posttreated with oxygen plasma at the environment temperature. The laser-induced damage threshold (LIDT) of the films increases from 15.9 to 23.1 J/cm2 after treatment with oxygen plasma. Compared with that of the as-grown samples, significant reduction of the average microdefect density and absorption are found after oxygen-plasma posttreatment. These results indicate that the oxygen-plasma posttreatment technique is an effective and simple method for reducing the microdefect density and absorption to improve the LIDT.
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