Spectroscopic Ellipsometry: Principles and Applications

Foreword. Preface. Acknowledgments. 1 Introduction to Spectroscopic Ellipsometry. 1.1 Features of Spectroscopic Ellipsometry. 1.2 Applications of Spectroscopic Ellipsometry. 1.3 Data Analysis. 1.4 History of Development. 1.5 Future Prospects. References. 2 Principles of Optics. 2.1 Propagation of Light. 2.2 Dielectrics. 2.3 Reflection and Transmission of Light. 2.4 Optical Interference. References. 3 Polarization of Light. 3.1 Representation of Polarized Light. 3.2 Optical Elements. 3.3 Jones Matrix. 3.4 Stokes Parameters. References. 4 Principles of Spectroscopic Ellipsometry. 4.1 Principles of Ellipsometry Measurement. 4.2 Ellipsometry Measurement. 4.3 Instrumentation for Ellipsometry. 4.4 Precision and Error of Measurement. References. 5 Data Analysis. 5.1 Interpretation of (PSI, DELTA). 5.2 Dielectric Function Models. 5.3 Effective Medium Approximation. 5.4 Optical Models. 5.5 Data Analysis Procedure. References. 6 Ellipsometry of Anisotropic Materials. 6.1 Reflection and Transmission of Light by Anisotropic Materials. 6.2 Fresnel Equations for Anisotropic Materials. 6.3 4x4 Matrix Method. 6.4 Interpretation of (PSI, DELTA) for Anisotropic Materials. 6.5 Measurement and Data Analysis of Anisotropic Materials. References. 7 Data Analysis Examples. 7.1 Insulators. 7.2 Semiconductors. 7.3 Metals/Semiconductors. 7.4 Organic Materials/Biomaterials. 7.5 Anisotropic Materials. References. 8 Real-Time Monitoring by Spectroscopic Ellipsometry. 8.1 Data Analysis in Real-Time Monitoring. 8.2 Observation of Thin-Film Growth by Real-Time Monitoring. 8.3 Process Control by Real-Time Monitoring. References. Appendices. 1 Trigonometric Functions. 2 Definitions of Optical Constants. 3 Maxwell's Equations for Conductors. 4 Jones-Mueller Matrix Conversion. 5 Kramers-Kronig Relations. Index.