Ultrafast Laser Nanoprocessing and Applications

This chapter comprehensively reviews fundamental knowledge on ultrafast laser processing at the nanoscale and its relevant applications. First, the principles and advantages of ultrafast laser processing are introduced, and its performance in terms of nanoscale processing is compared with that of laser processing using longer-duration pulses. Two representative methods of ultrafast laser nanoprocessing—two-photon polymerization/reduction and laser-induced formation of periodic surface structures—are illustrated. In addition, tailored ultrafast laser beam processing and near-field ultrafast laser processing for improving the performance and fabrication resolution are described. Several examples of the use of ultrafast laser nanoprocessing in practical applications are also presented. Finally, a summary and outlook are given.