Strain Measurements With Langasite SAW Resonators at High Temperature

声表面波 谐振器 材料科学 声表面波传感器 声学 声波 垂直的 共振(粒子物理) 表面波 拉伤 声共振 声波方程 光学 光电子学 物理 原子物理学 几何学 数学 内科学 医学
作者
Ling Li,Bin Peng,Jialiang Zhu,Zhengxi He,Yuntao Yang,Wanli Zhang
出处
期刊:IEEE Sensors Journal [Institute of Electrical and Electronics Engineers]
卷期号:21 (4): 4688-4695 被引量:24
标识
DOI:10.1109/jsen.2020.3032477
摘要

The strain sensitivities of the langasite surface acoustic wave resonators are strongly dependent on the temperature, which causes measurement strain to shift greatly at high temperature. To cancel the effect of temperature, a surface acoustic wave strain sensor which consisted of three langasite surface acoustic wave resonators was presented in this work. The surface acoustic wave resonators are configured to ensure that the propagation directions of the surface acoustic wave in the three surface acoustic wave resonators are parallel, perpendicular and at an orientation of 30° to the applied strain. The strain sensitivities of the three surface acoustic wave resonators from room temperature to 250 °C were investigated. Functional relationships of the resonance frequency shifts of the three surface acoustic wave resonators due to both the temperature and applied strain were established. It was deduced that the strain was linearly represented by the resonance frequency shifts of the three surface acoustic wave resonators. Experimental results demonstrated that the langasite surface acoustic wave strain sensor was well worked within the temperature range from room temperature to 250 °C. The average values of the calculated strains were in agreement with the practical applied strains. There was a little fluctuation between the calculated and preset strains. The measurement error was about 1%. The maximal standard deviation was about 18.5 με.

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