Wide Range Bridge Type 3D Tactile Sensor with Variable Sensitivity Through Replaceable Elastic Layer Attaching on PDMS Cap

This paper proposes a wide range 3 dimensional (3D) tactile sensor with variable sensitivity by using the robust bridge, array pyramid structure, and different Young's modulus and thickness of replaceable elastic layers on the assembled sensor's surface. In the structure of the sensor, the forces acting on the surface of the elastomer were transmitted to the bridges and silicon chip through the pyramids. Moreover, add one softer elastic layer on the surface of the PDMS cap, the hollow area will be compressed larger under the action of pressure since the hollow structure of the PDMS cap and different modulus between the elastic layer and PDMS cap. The sensitivities of this developed sensor increased three times compared to this sensor without an elastic layer in the measurement range of 100kPa (normal force).