A Novel THz Metasurface Sensor Based on the Integration of Carbon Nanotube Film and Grating Silicon Microfluidic Channel

A novel design for THz metasurface sensor based on the integration of carbon nanotube film (CNTs) and grating silicon (G-Si) microfluidic channel is proposed. Two obvious resonant absorption peaks located at 0.93 THz and 1.66 THz, the absorption is nearly 83.4% and 99.7%, respectively. Owing to the coupling of the CNTs and G-Si, a higher quality factor (Q) is obtained at the resonance absorption peak. The electric and magnetic field distribution of the resonance absorption peaks were investigated. The proposed novel THz metasurface sensor can be used for sensing various solutions with different refractive index flowing into the microfluidic channel.