β-(AlxGa(1−x))2O3 epitaxial growth, doping and transport

This chapter provides an overview of the background and current status of epitaxial growth, doping, and transport in alloys and heterostructures of (AlxGa(1 − x))2O3. Recent advances in the epitaxial growth of (AlxGa(1 − x))2O3 by molecular beam epitaxy and metalorganic chemical vapor deposition are reviewed. Recent work on impurity doping and carrier transport in thin films as well as modulation-doped heterostructures is discussed. Recent results on n-type doping in alloy thin films, as well as state-of-art mobility and 2-dimensional electron gas channels in modulation doped-structures are reviewed.