Plasma properties of RF magnetron sputtering system using Zn target

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation N. Nafarizal, A. R. Andreas Albert, A. S. Sharifah Amirah, O. Salwa, M. A. Riyaz Ahmad; Plasma properties of RF magnetron sputtering system using Zn target. AIP Conference Proceedings 29 June 2012; 1455 (1): 225–228. https://doi.org/10.1063/1.4732496 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioAIP Conference Proceedings Search Advanced Search |Citation Search