Work function of indium tin oxide transparent conductor measured by photoelectron spectroscopy

We used ultraviolet and x-ray photoelectron spectroscopy (XPS) and (UPS) techniques to directly measure absolute values of vacuum work function of indium tin oxide (ITO) thin films. We obtained a work function of 4.4–4.5 eV which is lower than the commonly cited value. These values do not change substantially by heating and Ar ion sputtering. The atomic concentrations of each element in ITO, measured with XPS, are also quite stable under heat treatment and ion sputtering.