材料科学
薄膜
制作
工具箱
残余应力
纳米技术
沉积(地质)
可靠性(半导体)
可扩展性
复合材料
机械工程
计算机科学
工程类
物理
生物
病理
古生物学
数据库
功率(物理)
医学
量子力学
替代医学
沉积物
作者
Megan J. Cordill,Patrice Kreiml,Christian Mitterer
出处
期刊:Materials
[MDPI AG]
日期:2022-01-25
卷期号:15 (3): 926-926
被引量:42
摘要
More and more flexible, bendable, and stretchable sensors and displays are becoming a reality. While complex engineering and fabrication methods exist to manufacture flexible thin film systems, materials engineering through advanced metallic thin film deposition methods can also be utilized to create robust and long-lasting flexible devices. In this review, materials engineering concepts as well as electro-mechanical testing aspects will be discussed for metallic films. Through the use of residual stress, film thickness, or microstructure tailoring, all controlled by the film deposition parameters, long-lasting flexible film systems in terms of increased fracture or deformation strains, electrical or mechanical reliability, can be generated. These topics, as well as concrete examples, will be discussed. One objective of this work is to provide a toolbox with sustainable and scalable methods to create robust metal thin films for flexible, bendable, and stretchable applications.
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