研磨
抛光
材料科学
石英
复合材料
扫描电子显微镜
表面粗糙度
缩进
断裂韧性
各向异性
表面光洁度
脆性
压力(语言学)
轮廓仪
变形(气象学)
光学
语言学
哲学
物理
作者
Pedro L. Guzzo,José Daniel Biasoli de Mello
出处
期刊:IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
[Institute of Electrical and Electronics Engineers]
日期:2000-09-01
卷期号:47 (5): 1217-1227
被引量:20
摘要
Lapping and polishing processes of natural quartz are investigated in relation to crystallographic orientation and applied normal stress. Weight loss measurements and surface profilometry were carried out in X-, Y-, Z-, and AT-cut samples. The relationship found between material removal rate and stress depends on specimen orientation. Based on indentation fracture mechanics, this behavior is discussed in relation to fracture toughness and scratch hardness anisotropy of quartz crystals. Scanning electron microscopy (SEM) shows that brittle microcracking is the primary mechanism involved with material removal in the lapping process. Plastic deformation mechanisms begin to operate on lapped and polished surfaces above a certain value of stress. Surface profiles and SEM micrographs show that the roughness of lapped surfaces decreases with increasing normal stress, but an opposite behavior is observed in polished surfaces.
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