Analysis of damage threshold of K9 glass irradiated by 248-nm KrF excimer laser

The theoretical model of K9 glass irradiated by a 248-nm KrF excimer laser was established, and a numerical simulation was performed to calculate temperature and thermal stress fields in the K9 glass sample using the finite element method. The laser-induced damage thresholds were defined and calculated, and the effect of repetition frequency and the number of pulses on the damage threshold were also studied. Furthermore, the experiment research was carried out to confirm the numerical simulation. The damage threshold and damage morphology were analyzed by means of a metallurgical microscope and scanning electron microscopy. The simulation and experimental results indicated that the damage mechanism of K9 glass irradiated by a KrF excimer laser was melting damage and stress damage, and the stress damage first appeared inside the K9 glass sample. The tensile stress damage threshold, the compressive stress damage threshold, and the melting damage threshold were 0.64, 0.76, and 1.05 J/cm2, respectively. The damage threshold decreased with increasing repetition frequency and number of laser pulses. The experimental results indicated that the damage threshold of K9 glass was 2.8 J/cm2.