表征(材料科学)
双层
拉曼光谱
纳米技术
二硫化钼
化学气相沉积
材料科学
卷积神经网络
双层石墨烯
深度学习
薄膜
光电子学
石墨烯
计算机科学
人工智能
化学
光学
膜
物理
生物化学
冶金
作者
Haitao Yang,Ruiqi Hu,Heng Wu,Xiaolong He,Yan Zhou,Yizhe Xue,Kexin He,Wenshuai Hu,Haosen Chen,Mingming Gong,Xin Zhang,Ping‐Heng Tan,E. Hernández,Yong Xie
出处
期刊:Nano Letters
[American Chemical Society]
日期:2024-02-26
卷期号:24 (9): 2789-2797
被引量:2
标识
DOI:10.1021/acs.nanolett.3c04815
摘要
Two-dimensional materials are expected to play an important role in next-generation electronics and optoelectronic devices. Recently, twisted bilayer graphene and transition metal dichalcogenides have attracted significant attention due to their unique physical properties and potential applications. In this study, we describe the use of optical microscopy to collect the color space of chemical vapor deposition (CVD) of molybdenum disulfide (MoS2) and the application of a semantic segmentation convolutional neural network (CNN) to accurately and rapidly identify thicknesses of MoS2 flakes. A second CNN model is trained to provide precise predictions on the twist angle of CVD-grown bilayer flakes. This model harnessed a data set comprising over 10,000 synthetic images, encompassing geometries spanning from hexagonal to triangular shapes. Subsequent validation of the deep learning predictions on twist angles was executed through the second harmonic generation and Raman spectroscopy. Our results introduce a scalable methodology for automated inspection of twisted atomically thin CVD-grown bilayers.
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