Development of a Micro Gas Sensor with a Suspended Micro Heater for Methyl Mercaptan Gas Detection

The chip size of this integrated microsensor for methyl mercaptan (CH3SH) gas detection, which includes a microheater, is only $5\text{mm}\times 5\text{mm}$ . The silicon substrate is etched using KOH from the bottom to reduce energy consumption. According to the measurement results, the optimal operating temperature for the CH3SH micro gas sensor is determined to be 200°C. At a concentration of 5 ppm CH3SH, the sensor exhibits high responsivity (2.42), short response time (3 seconds), and recovery time (12 seconds).