Implementation, Modelling and Verification of High-Speed Mach-Zehnder Phase Modulators in an Open Access InP Foundry Platform

We present the introduction of high-speed phase modulators based on the quantum-confined Stark effect to the generic InP foundry platform at Fraunhofer HHI. An overview of the technological integration of the high-speed phase Mach-Zehnder modulators (MZM) to the existing generic foundry process is described. In addition, an electro-optical behavioral model for the high speed MZM, which gives insight into the influence of design parameters on performance, is discussed. The presented MZM structure with a traveling wave electrode length of 5 mm has a $V_\pi$ of 1.4 V and a small signal electro-optic 3 dB bandwidth of 32 GHz. Large signal RF operation up to 80 Gbps is demonstrated. To the best of our knowledge, these are the highest-performance MZMs in an InP open access integrated photonics foundry platform.