Green-laser-doped selective emitters with separate BBr3 diffusion processes for high-efficiency n-type silicon solar cells

硼硅酸盐玻璃 材料科学 共发射极 兴奋剂 激光器 扩散 紫外线 光电子学 分析化学(期刊) 光学 化学 冶金 有机化学 物理 热力学 色谱法
作者
Wenjie Lin,Daming Chen,Chengfa Liu,Yao Wang,Yu Ting He,Yang Zou,Ling Yuan,Jian Gong,Yang Yang,Zhiqiang Feng,Zongtao Liu,Zhiming Chen,Qi Xie,Zongcun Liang,Yifeng Chen,Hui Shen
出处
期刊:Solar Energy Materials and Solar Cells [Elsevier BV]
卷期号:210: 110462-110462 被引量:21
标识
DOI:10.1016/j.solmat.2020.110462
摘要

Laser-doped boron selective emitters are an ideal candidate for enabling less emitter recombination, lower contact resistance and better blue response of efficient n-type silicon solar cells. However, the low boron concentration of the borosilicate glasses formed during boron diffusion processes and the implementation of ultraviolet lasers have hindered the commercialization of laser-doped boron selective emitters. In this contribution, separate BBr3 diffusion processes for green-laser-doped selective emitters are demonstrated. Laser doping processes were conducted between (1) borosilicate glass deposition and boron driving in and (2) post-oxidation, achieving the optimized laser doped selective emitter with the Rsheet,p+/Rsheet,p++ of 95.0 Ω/□/54.3 Ω/□, accompanying with the p+ profile of Nmax < 1.4× 1019 cm−3. By comparison to the homogeneous emitter with sheet resistance of 88.9 Ω/□, J0e, total of 45.3 fA/cm2 and ρc, metal of 2.9 mΩ/cm2, the employment of the optimum laser doped selective emitter has resulted in the J0e, total of 31.1 fA/cm2 and the ρc, metal of 1.0 mΩ/cm2. Finally, the improvement of simulated VOC (699.6 mV), FF (81.38%) and efficiency (23.13%) were obtained by using the optimized laser doped SEs, compared with the simulated VOC (694.5 mV), FF (81.14%) and efficiency (22.89%) of the reference. Separate BBr3 diffusion processes for green-laser-doped selective emitters demonstrate the employment of industrial green laser and boron diffusion furnace, instead of expensive ultraviolet laser and other complex boron resources, indicating a promising potential for industrial feasibility.
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