Design and Development of a Hot S-Parameter Measurement System for Plasma and Magnetron Applications

This paper presents the design, development and calibration procedures of a novel hot S-parameter measurement system for plasma and magnetron applications with power level up to 6 kW. Based on a vector network analyzer, a power amplifier and two directional couplers, the input matching hotS 11 and transmission hotS 21 of the device under test are measured at 2.45 GHz center frequency and 300MHz bandwidth, while the device is driven by the magnetron. This measurement system opens a new horizon to develop many new industrial applications such as microwave plasma jets, dryer systems, dryers and so forth. Furthermore, the developing, controlling and monitoring a 2kW 2.45GHz plasma jet and a dryer system using the measurement system are presented and explained.