Large-Range Spurious Mode Elimination for Wideband SAW Filters on LiNbO₃/SiO₂/Si Platform by LiNbO₃ Cut Angle Modulation

宽带 材料科学 调制(音乐) 虚假关系 频率调制 光学 光电子学 铌酸锂 模式(计算机接口) 声表面波 航程(航空) 声学 电子工程 带宽(计算) 物理 工程类 计算机科学 电信 操作系统 机器学习 复合材料
作者
Huiping Xu,Sulei Fu,Junyao Shen,Zengtian Lu,Rongxuan Su,Ruikang K. Wang,Cheng Song,Fei Zeng,Weibiao Wang,Feng Pan
出处
期刊:IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control [Institute of Electrical and Electronics Engineers]
卷期号:69 (11): 3117-3125 被引量:36
标识
DOI:10.1109/tuffc.2022.3152010
摘要

A LiNbO3 (LN)/SiO2/Si multilayered structure was recently reported as a new platform for achieving wideband radio frequency (RF) filters. However, the in-band ripples in filters resulting from the spurious Rayleigh mode lead to deteriorated performance, and thus, a wide Rayleigh elimination window (REW) is highly desired for realizing spurious-free wideband surface acoustic wave (SAW) filters with a wide design space and good process tolerance. Here, we investigated the spurious mode suppression on the LN/SiO2/Si platform theoretically and experimentally through modulating the cut angle ( $\theta $ ) of LN. The ${K}^{{2}}$ dispersion characteristics of the main mode (shear-horizontal wave) and spurious mode (Rayleigh wave) on LN/SiO2/Si substrates were systematically analyzed by the finite-element method (FEM), along with bulk LN for comparison. It is found that the REW is wider on LN/SiO2/Si than bulk LN, as Rayleigh wave can be totally eliminated with Cu electrode normalized thickness ( ${h}_{\text {Cu}}/\lambda $ ) ranging from 0.1 to 0.19 when $\theta $ is between 19° and 22° on the LN/SiO2/Si platform, in contrast to the quite narrow REW on bulk LN restricted to some specific ${h}_{\text {Cu}}/\lambda$ . To verify the simulation results, resonators were prepared on 15°YX-LN/SiO2/Si, 20°YX-LN/SiO2/Si, bulk 15°YX-LN, and bulk 20°YX-LN. In addition, the typical spurious-free wideband SAW filter with ${h}_{\text {Cu}} = {200}$ nm based on the 20°YX-LN/SiO2/Si platform demonstrates high performance with a center frequency ( ${f}_{\text {c}}$ ) of 1.27 GHz, a minimum insertion loss (ILmin) of 0.7 dB, and a 3-dB fractional bandwidth (FBW) of ~20.1%. This work provides a workable solution in fabricating spurious-free wideband and low-loss SAW filters for fifth-generation (5G) applications.
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