Electrochemical characteristics of alumina dielectric layers

The electrochemical characteristics of alumina dielectric layers were studied using a surface roughness factor and an impedance spectroscopy. From the limiting diffusion current method, the surface area factor of the dielectric anodic layer with low electrical conductivity was estimated to be 1.03. As alumina dielectric films on Al have a variable stoichiometry, the electrochemical behavior of Al2O3 layer can be monitored by evaluating an equivalent circuit with Young impedance of dielectric constant with a vertical decay of conductivity.